STATISTICS 3N03/3J04
Instructions
Questions
(a) The carbon content (ppm) of a silicon wafer was measured with a spectrometer five times on each of two consecutive days. Is there evidence that the calibration of the spectrometer has changed from the first day to the second?
Day 1: 2.1321 2.1385 2.0985 2.0941 2.0680 Day 2: 2.0853 2.1476 2.0733 2.1194 2.0717
(b) A dry etch process is used to etch silicon dioxide off of silicon wafers. A total of 10 wafers were sampled after etching, and the etch rates (A/min) measured at two different sites, one near the centre of the wafer, one near the edge. Can you conclude that the etch rates differ between the centre and the edge? Do the analysis two ways, with and without assuming normality; do your conclusions agree? Which test has the greater power? Which test is the more robust?
Centre: 586 568 587 550 543 552 562 577 558 571 Edge: 582 569 587 543 540 548 563 572 559 566